Report Time: April 10, 2022 14:30--16:00

Report Type：#Tencent Metting：573-962-292

Reporter：Arthur Yayi Wei, Researcher

Biography: Dr. Yayi Wei is a researcher and PhD supervisor at the Institute of Microelectronics, Chinese Academy of Sciences, and a professor at the University of Chinese Academy of Sciences. He has worked at the Oak Ridge National Laboratory of the U.S. Department of Energy, the New York R&D Center of Infineon, and the New York R&D Center of Grosvenor. Dr. Wei has been engaged in the research and development of equipment, materials and processes in the field of semiconductor lithography for a long time, and has participated in or led the development of lithography processes from 180nm to 10nm nodes, with rich experience in advanced lithography research and development, and has acquired many core technologies. Dr. Wei has published over 70 professional papers and holds several US patents. He was invited by SPIE to publish a book "Advanced processes for 193nm immersion lithography" in 2009 for his pioneering contributions to 193nm immersion lithography, which has been used as a textbook and main reference book for graduate students in many universities and research institutions in the U.S. He returned to work in China in July 2013 and firstly As the chief scientist of the project, he presided over the "300mm wafer homogenization equipment and lithography process development" (Shenyang Core Source Microelectronics Equipment Co., Ltd.); and established the computational lithography group at the Institute of Microelectronics, Chinese Academy of Sciences, which is engaged in the light source-mask co-optimization (SMO) and optical proximity correction (OPC) for sub-20nm technology nodes. Optical Proximity Correction (OPC) research. The research results of Yayi Wei were widely used in the mass production process of FinFET and 3D NAND in China, and the book "Advanced Lithography Theory and Applications for Ultra-Scale Integrated Circuits" was published in Science Press in July 2016. Dr. Yayi Wei is the director of the center and the open lab.

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